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Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates

Bibliographic reference Roquiny, Philippe ; Poulet, A. ; Leys, Y. ; Descamps, J.-C. ; Bodart, Franz ; et. al. Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates. In: Thin solid films, vol. 355-356, p. 357-362 (1999)
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