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Study of the electronic properties and depth profiles of buried and near-surface silicon nitride layers produced by ion implantation

Bibliographic reference Markwitz, Andreas ; Arps, M. ; Baumann, H. ; Demortier, Guy ; Krimmel, E.F. ; et. al. Study of the electronic properties and depth profiles of buried and near-surface silicon nitride layers produced by ion implantation. In: Nuclear instruments and methods, vol. B124, p. 506-514 (1997)
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